APPLICATIONS
- Ion generation device for High Current Implanter.
- Apply for AMAT HCP/HCS/Trident series.
FEATURES & BENEFITS
- Excellent Surface Roughness (Ra= 1.2)
- Complete >10 hrs high pressure test under 7 Kg/cm2
- Integrated module provides the best material strength
- Superior welding techniques prolongs the part life-time
- Plug & play, no additional cooling piping change requirement
Quantum HCP, HCS, and Trident series high current ion implanters.
Quantum HCP, HCS, and Trident series high current ion implanters primarily utilize the Enhanced Bernas Ion Source (commonly configured with an arc chamber, filament, cathode, and anti-cathode/repeller) as their core ion generation device.
Depending on your specific process node, engineering goals, and maintenance cycles, these ion source components and upgrades are generally categorized into the following types:
1. Core Ion Source Assemblies & Consumables
High current implanters operate under high temperature and corrosive environments (especially when running species like BF₃, AsH₃, or PH₃). Standard replacement parts include:
- Arc Chambers: Typically fabricated from high-density graphite, tungsten, or molybdenum to withstand intense plasma exposure.
- Filaments & Cathodes: Heavy-duty tungsten filaments designed to emit electrons for gas ionization.
- Repellers / Anti-Cathodes: Positioned opposite the cathode to reflect electrons back into the plasma, maximizing ionization efficiency.
- Insulators: High-purity boron nitride (BN) or aluminum oxide (Al₂O₃) components to isolate high-voltage arcs.
2. Advanced Upgrades & Extended Life Sources
For the HCP, HCS, and Trident platforms, many fabs swap standard Bernas sources for upgraded configurations to increase Mean Time Between Cleans (MTBC):
- EHC (Enhanced Hot Cathode) Sources: Improves plasma stability and extends the lifetime of the cathode when utilizing heavy molecular ions or specialized species.
- Dual-Cathode / Extended Life Designs: Modifies the internal geometry and material coatings (e.g., lanthanum hexaboride or advanced tungsten alloys) to minimize glitching and particle generation.
3. Sourcing & Operational Trade-Offs
| Option | Benefits | Trade-offs |
|---|---|---|
| OEM | Guaranteed process matching, qualification support, and compliance with Trident/HCP factory specs. | Higher cost and potentially longer lead times for older legacy series. |
| Alternative Third-Party Parts | Significant cost reduction for consumables (graphite, tungsten filaments); specialized coatings available. | Requires internal fab qualification; risk of subtle geometry variations affecting beam current matching. |
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