VHP Robot

APPLICATIONS

• Apply for AMAT tools
• Platform: Endura, Centura, Producer, RTP Centura
• AMAT VHP (Vacuum High Performance) Robot Repair,Overhaul
• Transfer chamber Robot
• Wafer Size: 8″, 12″

FEATURES & BENEFITS

• At high speed NO jitter
• Brand new NSK Bearing
• VHP Robot Repair
• VHP Robot Refurbishment / Overhaul
• Vacuum Robot Controller Repair
• VHP Robot Blade / Arm replacement

AMAT VHP Robot Repair & Refurbishment

Since AMAT VHP Robot are widely used in vacuum chambers (transfer chambers) such as Endura, Centura, and Producer in Applied Materials, their repair quality directly affects the stability and yield of wafer transfer.

The following is a structured breakdown of core repair priorities and inspection items:

I. Electrical & Control System:

The precise positioning and jitter prevention of the robot are highly dependent on the health of the motors and sensors. Resolver/Encoder Signal Detection: The machine’s operating speed must be simulated, and the sine and cosine signals read by the resolver or encoder must be analyzed to ensure that the Position Servo is absolutely correct and free of noise. Home Sensor Inspection and Replacement: When the robot performs a home return action, the Home Sensor’s reading signal must be timely and normal. It is usually replaced preventively during overhaul. Motor magnet demagnetization (magnetization): After prolonged high-temperature or high-load operation, the motor magnet may demagnetize. During maintenance, remagnetization or replacement is necessary to maintain stable torque output. Driver parameter setting: The focus is on recalibrating the driver parameters to eliminate electrical micro-jitter caused by high impedance.

II. Mechanical Parts:

Wear on the transmission mechanism directly reflects backlash and vibration at the blade/fork. Harmonic Drive/Gear: A core component during overhaul; inspect tooth wear and backlash. If abnormalities are found, replace the harmonic gear and its matching harmonic bearing. Thin-section bearings: Precision bearings (such as NSK bearings) used in the pivot case are prone to wear and are usually completely replaced during overhaul to ensure “no jitter” during high-speed operation. Hand Mechanism and Blade Calibration: Check the arm linkages and flatness to ensure the wafer carrier’s dynamic level meets original manufacturer specifications, preventing wafer scratches or slippage. Lock-pin and Fastener Replacement: Consumable fasteners such as lock-pins must be replaced after detailed disassembly to prevent fatigue fracture from repeated disassembly and reassembly.

III. Key Pre-shipment Testing & Validation:

Quality verification after repair must rely on a professional testing platform. Full-simulation Online Testing (In-line/Off-line Test): Using a dedicated test bench to simulate the machine environment, continuous operation for at least 24 hours confirms transport stability. Dynamic Jitter Analysis: Measure minute vibrations at the end of the arm during rapid stops, extensions, and retractions using high magnification or laser measurement.

• VHP Robot ARM SET Repair,Overhaul
• 0020-25769
• 0020-25770
• 0040-75906
• 0040-75907

• VHP Robot Pivot Repair,Overhaul
• 0020-75889
• 0010-02170
• 0010-02171

AMAT VHP Robot type(VHP Robot Repair , Overhaul , Exchange 8″Centura/Producer/12″ETCH)

AMAT VHP Robot Drive Repair,Overhaul

Second-source semiconductor equipment, AMAT VHP Robot parts,