APPLICATIONS
- Electrostatic Chuck (ESC) is the part to fix the wafer in semiconductor manufacturing equipment by the power of static electricity.
- Generally ESC is classified into monopolar type and bipolar type according to the number of electrodes.
- It also divied into COLUMB type and JONSEN-RAHBEK type depending on the the size of Dielectric Resistivity.
FEATURES & BENEFITS
- Electrostatic Chuck ESC NEW Design
- ESC Repair Technology
- Specialized processing of material
- Test & Inspection
Electrostatic Chuck ESC Repair
Electrostatic Chuck Repair Process
- Inspection and Diagnosis
Use professional equipment to conduct a comprehensive inspection of the electrostatic chuck, including adsorption force testing, voltage stability testing, and structural integrity checks.
Perform a detailed diagnosis to determine the source and extent of the fault and provide a repair report.
- Electrostatic Chuck ESC Repair and Replacement
Electrical System Repair: Repair or replace aging electrodes, damaged internal wiring, and electrostatic control modules.
Structural Component Repair: Replace deformed or damaged structural components and recalibrate the chuck’s positioning accuracy.
Surface Treatment: Clean contaminants from the chuck surface; if necessary, re-coat the surface to restore adsorption performance.
- Performance Testing and Calibration
Perform functional tests on the repaired chuck, including adsorption force, electrostatic voltage stability, and temperature resistance testing.
Calibrate the chuck’s performance to ensure it meets the production line’s operating standards and accuracy requirements.
- Electrostatic Chuck Reporting and After-Sales Support
Provide a detailed inspection report after repair, recording the fault resolution and performance recovery data.
Provide usage suggestions and maintenance guidelines to reduce the probability of recurrence.
- Electrostatic Chuck Repair Levels
Level 1: Surface Repair
Level 2: Re-bonding
Level 3: Plate Replacement
Level 4: Heating Plate Replacement
Level 5: Brand New
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