• 產品介紹

Cooling IHC Source

300mm 5 Zone Contour CMP Head (Refurbishment and Parts)

200mm CMP Head (Titan I , Titan II , 5 zone Contour) Refurbishment and Parts

AMAT Endpoint PC,P5000,5200 SUPER-E,Centura, Producer,

Shower Head

Ceramic Parts

AMAT VHP Robot

Electrostatic Chuck (ESC)

AMAT 300mm CMP Head Titan Profiler

Ceramic Parts

APPLICATIONS

  • Apply for AMAT tools

Part Number

  • 0020-03312 rev05, 0021-24183 rev03, 0021-24183 rev04
  • 0021-24184 rev001, 0021-24184 rev002, 0021-24184 rev003
  • 0040-70151, 0200-00668 rev003, 0200-00668 rev004
  • 0200-00668 rev05, 0200-00688, 0200-02396 rev002
  • 0200-02396, 0200-02414 rev003, 0200-02525 rev003
  • 0200-02525 rev04, 0200-02525 rev005, 0200-02525
  • 0200-03405 rev04, 0200-03407 rev003, 0200-03954 rev002
  • 0200-04654 rev002, 0200-05623 rev002
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